Multicomponent Thin Films Deposited by PVD ARC and LARC Technology

  • Dagmar JAKUBÉCZYOVÁ Institute of Materials Research Slovak Academy of Sciences Watsonova 47 040 01 Košice Slovak Republic
  • Marek KOČÍK Institute of Materials Research Slovak Academy of Sciences Watsonova 47 040 01 Košice Slovak Republic
  • Pavol HVIZDOŠ Institute of Materials Research Slovak Academy of Sciences Watsonova 47 040 01 Košice Slovak Republic
Keywords: Thin films, PVD, calotest, GDOES, nanohardness

Abstract

The paper is focused on a comparison of advanced layers deposited by two coating technologies – cathodic arc deposition (ARC) and lateral rotating cathodes (LARC). For characterization standard analyses were selected: the determination of the layer wear resistance by Calotest method, specification of the depth concentration profiles of constituting elements from the coating surface down to the substrate, and measurement of the nanohardness at dynamic loading. The thickness of the CrTiN layer reached 1380 nm1740 nm and that of the multi/nanolayers AlXN3 was 2630 nm3160 nm. The coating nanohardness on the surface attained 39 GPa for AlXN3 (X = Cr), 33 GPa for CrTiN and 12.5 GPa for the substrate. Only at coating prepared by LARC-Technology it is possible to create the multilayers of nanometric dimensions. AlXN3 coating was formed by 48 layers with dimensions of 58 nm70 nm. These nanolayers lead to the increase of system toughness as they prevent the crack propagation. Their application on the tools and components promises to increase their durability under service conditions.

DOI: http://dx.doi.org/10.5755/j01.ms.20.1.3716

Published
2014-03-23
Section
METALS, ALLOYS, COATINGS