Scanning Electron Microscopy: Extrapolation of 3D Data from SEM Micrographs

  • Simonas KAREIVA Vilnius University
  • Algirdas SELSKIS Institute of Chemistry, Center for Physical Sciences and Technology
  • Feliksas IVANAUSKAS Vilnius University
  • Simas ŠAKIRZANOVAS Vilnius University
  • Aivaras KAREIVA Vilnius University
Keywords: SEM, 3D images, spatial reconstruction, stereoscopic analysis

Abstract

n this manuscript we suggest a three-dimensional reconstruction technique to fully characterize structural performance of solid materials. The described technique extrapolates, measures and interprets the 3-dimensional data which is extracted from SEM images, obtained from different angles. Further, finer results were achieved by extrapolating of spatial data from three or more sample images using visual reconstruction software applications. Gold particles, silicon wafers and dendrites were selected as model materials for the spatial 3D surface reconstruction. For comparison and proof-of-concept, stereoscopy technique was also included into the research.

DOI: http://dx.doi.org/10.5755/j01.ms.21.4.11101

Published
2015-11-19
Section
TESTING AND ANALYSIS OF MATERIALS