The Investigation of E-beam Deposited Titanium Dioxide and Calcium Titanate Thin Films

Authors

  • Kristina BOČKUTĖ Physics Department, Kaunas University of Technology
  • Giedrius LAUKAITIS Physics Department, Kaunas University of Technology
  • Darius VIRBUKAS Physics Department, Kaunas University of Technology
  • Darius MILČIUS Center for Hydrogen Energy Technologies, Lithuanian Energy Institute

DOI:

https://doi.org/10.5755/j01.ms.19.3.1805

Keywords:

electron beam evaporation, titanium oxide, calcium titanate, optical properties

Abstract

Thin titanium dioxide and calcium titanate films were deposited using electron beam evaporation technique. The substrate temperature during the deposition was changed from room temperature to 600 °C to test its influence on TiO2 film formation and optical properties. The properties of CaTiO3 were investigated also. For the evaluation of the structural properties the formed thin ceramic films were studied by X-ray diffraction (XRD), energy dispersive spectrometry (EDS), scanning electron microscopy (SEM) and atomic force microscopy (AFM). Optical properties of thin TiO2 ceramics were investigated using optical spectroscope and the experimental data were collected in the ultraviolet-visible and near-infrared ranges with a step width of 1 nm. Electrical properties were investigated by impedance spectroscopy.It was found that substrate temperature has influence on the formed thin films density. The density increased when the substrate temperature increased. Substrate temperature had influence on the crystallographic, structural and optical properties also.

DOI: http://dx.doi.org/10.5755/j01.ms.19.3.1805

Author Biographies

Giedrius LAUKAITIS, Physics Department, Kaunas University of Technology

Prof.

Darius VIRBUKAS, Physics Department, Kaunas University of Technology

Dr.

Darius MILČIUS, Center for Hydrogen Energy Technologies, Lithuanian Energy Institute

Dr.

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Published

2013-09-17

Issue

Vol. 19 No. 3 (2013)

Section

ELECTRONIC AND OPTICAL MATERIALS

License

 

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