XPS Investigation of TiO2/ZrO2/SiO2 Films Modified with Ag/Au Nanoparticles

  • Mindaugas ANDRULEVIČIUS∗, Sigitas TAMULEVIČIUS , Yuriy GNATYUK, Nadija VITYUK, Natalia SMIRNOVA, Anna EREMENKO Kaunas University of Technology
Keywords: XPS, TiO2/ZrO2/SiO2 films, noble metal nanoparticles.


Nanocomposites of inorganic nanoparticles have attracted considerable attention recently. In present work
TiO2/ZrO2/SiO2 ternary films have been prepared using low-temperature sol-gel method. Corresponding alkoxides were
used as titanium, zirconium and silicon sources and acetylaceton as complexing agent. The films were deposited onto
titanium substrates using dip-coating technique. Samples modified with metal nanoparticles were prepared by adding
appropriate metal source into the sol. Subsequent thermal treatment of the films led to crystallization of oxide matrix
with incorporated metal nanoparticles, which was monitored by the appearance of the surface plasmon band of Au/Ag
metal particles in the UV-VIS spectra of the films. Chemical composition of the films was investigated by X-ray
photoelectron spectroscopy (XPS). Films of single, double, triple oxides and triple oxides modified with noble metals
were investigated. Comparison of peaks positions in single, double and triple systems led to assumption that produced
TiO2/ZrO2/SiO2 films are ternary oxides. It was found that the negative shift of the O 1s peak of oxygen bounded to
silicon depends mostly on Ti content in the mixed oxides films. Correlation between oxygen O 1s peak shift, optical
band gap decrese and catalytical activity of the films was noticed