Electrochemical Behavior of Titanium Thin Films Obtained by Magnetron Sputtering

  • David TURCIO-ORTEGA∗, Sandra Elizabeth RODIL, Stephen MUHL Instituto de Investigaciones en Materiales, Universidad Nacional Autónoma de México
Keywords: titanium thin films; magnetron sputtering; biomaterials; EIS.


A study of titanium thin films deposited on stainless steel 316L having different thickness was carried out using the
Electrochemical Impedance Spectroscopy (EIS) and Polarization Curves (PC) experiments as the coated system were
immersed in 0.89 % NaCl solution. The interpretation of the EIS data is based upon a two-layer model of the film,
consisting of a Ti thin film and a Ti-oxide outer layer. The circuit parameters were correlated with the dielectric
characteristics and microstucture of the titanium thin films. Analysis of experimental results done by modelling the EIS
data show that the corrosion process was getting difficult with time, while the PC gives information about the corrosion
rate of the coated systems as a function of the thickness of the Ti deposit.