Determination of Thickness and Density of Ultra Thin Iron Films by Grazing Angle Incidence X-ray Fluorescence

  • Algimantas MEŠKAUSKAS∗ Kaunas University of Technology
Keywords: ultra thin films, iron, X-ray fluorescence, critical angle.

Abstract

An efficient and accurate method to characterize the physical thickness of ultra thin iron films is presented. Fe thin films
were grown directly on n-Si(111) substrates by unbalanced magnetron system. X-ray fluorescence system was applied to
measure coating thickness and perform material analysis. The composition and density of the films were characterized
by measuring critical angle of reflection using X-ray fluorescence. It is shown that XRF analysis allows determination of
thickness of samples potentially important for future technological interest.

Published
2008-03-11
Section
TESTING AND ANALYSIS OF MATERIALS