Modelling and Fabrication of Micro-SOFC Membrane Structure

  • Brigita ABAKEVIČIENĖ Kaunas University of Technology
  • Viktoras GRIGALIŪNAS Kaunas University of Technology
  • Jolita SAKALIŪNIENĖ Kaunas University of Technology
  • Dainius VIRGANAVIČIUS Kaunas University of Technology
  • Kęstutis ŠLAPIKAS Kaunas University of Technology
  • Marius MIKOLAJŪNAS Kaunas University of Technology
  • Sigitas TAMULEVIČIUS Kaunas University of Technology
Keywords: micro-solid oxide fuel cell, bulk micromachining, Pt/YSZ/Pt membrane, stress modelling

Abstract

Fabrication process of micro-SOFC membrane structure using the bulk micromachining of silicon technique with SiO2 and Si3N4 sacrificial layers is presented in this study. The process involves back side photolithography, magnetron sputtering of platinum thin films, thermal evaporation of YSZ electrolyte, deep reactive ion etching of silicon, and, finally, release of free-standing membrane using CF4/O2 plasma etching.

X-ray analysis shows the cubic phase of YSZ electrolyte and platinum electrodes. Modelling of normal stress distribution in the micro-SOFC structure with the Si3N4 sacrificial layer shows that at high temperatures the substrate expands less than the coating, causing tensile stresses in the substrate area next to the coating and compressive stresses in the coating, as the substrate material has a lower coefficient of thermal expansion than the layered Pt/YSZ/Pt coating.

DOI: http://dx.doi.org/10.5755/j01.ms.20.2.5585

Author Biography

Brigita ABAKEVIČIENĖ, Kaunas University of Technology
Docentė, Dr.
Published
2014-06-13
Section
CERAMICS AND GLASSES