Influence of Reactive Ion Etching on THz Transmission and Reflection Properties of NiCr Film Deposited on a Dielectric Substrate

  • Jun Gou
  • Jun WANG University of Electronic Science and Technology of China
  • Wei Zhi LI University of Electronic Science and Technology of China
  • Xiong Bang WEI University of Electronic Science and Technology of China
  • Hui Ling TAI University of Electronic Science and Technology of China
  • De En GU University of Electronic Science and Technology of China
  • Ya Dong JIANG University of Electronic Science and Technology of China
Keywords: NiCr thin film, RIE, THz, Transmission, Reflection, Absorption

Abstract

Enhanced terahertz (THz) absorption of NiCr film deposited on a dielectric substrate has been proven by applying a reactive ion etching (RIE) treatment to the dielectric film. Nano – scale nickel – chromium (NiCr) thin films are deposited on RIE treated silicon dioxide (SiO2) dielectric substrates to study the transmission and reflection characteristics. Experimental results suggest that both transmission and reflection of NiCr film are weakened by the RIE treatment. The most significant decrease of transmission is observed in 1 ~ 4 THz while that of reflection occurs in 1.7 ~ 2.5 THz band. The decrease of both transmission and reflection is more significant for NiCr film with higher thickness. The RIE treatment, which induces nano – scale surface structures and increases the effective surface area of NiCr film, enhances the absorption and weakens the transmission and reflection of THz radiation.

DOI: http://dx.doi.org/10.5755/j01.ms.21.2.6131

Published
2015-06-29
Section
ELECTRONIC AND OPTICAL MATERIALS