Structure, Properties and Applications of Diamond Like Nanocomposite (SiOx Containing DLC) Films: A Review

Authors

  • Šarūnas MEŠKINIS Kaunas University of Technology
  • Asta TAMULEVIČIENĖ Kaunas University of Technology

DOI:

https://doi.org/10.5755/j01.ms.17.4.770

Keywords:

SiOx containing diamond like carbon, diamond like nanocomposite films

Abstract

The present article reviews current situation on SiOx containing diamond like carbon (diamond like nanocomposite) films. The overview of different deposition methods and reagents used is presented; chemical composition of different diamond like nanocomposite films is described. Different models of structure of diamond like nanocomposite films are considered. Mechanical, optical, electrical properties as well as surface energy of diamond like nanocomposite films produced by different methods are reviewed and discussed. The survey of different potential and industrial applications of diamond like nanocomposite films is presented.

http://dx.doi.org/10.5755/j01.ms.17.4.770

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Published

2011-11-18

Issue

Vol. 17 No. 4 (2011)

Section

ELECTRONIC AND OPTICAL MATERIALS

License

 

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