Diamond like Carbon Film as Potential Antireflective Coating for Silicon Solar Cells
Keywords:DLC films, antireflection properties, solar cells.
In the present study DLC films were deposited on crystalline silicon and quartz substrates from hydrocarbon gases
(acetylene (C2H2) and methane (CH4)) by two methods: employing closed drift ion source and radio frequency plasma
enhanced chemical vapour deposition (RF PECVD) technique. Optical properties of the formed films were analyzed
employing UV/VIS/NIR spectroscopy. It was observed that in both deposition methods the lowest refractive index (at
λ = 632.8 nm), which corresponds to the highest amount of bound hydrogen, is observed when energies per carbon atom
are approximately 150 eV (300 eV ion beam energy in a closed drift ion source) and 160 eV (400 V bias voltage in RF
PECVD). It is shown that depending on the deposition conditions the region of minimum reflection for the system
DLC-crystalline silicon can be varied in a wide range.
The copyrights for articles in this journal are retained by the author(s), with first publication rights granted to the journal. By virtue of their appearance in this open-access journal, articles are free to use with proper attribution in educational and other non-commercial settings.