The Surface Roughness Variation Due to Ion Irradiation During Thin Film Growth
Keywords:Volmer-Weber growth, surface diffusion, kinetic modeling, surface roughness
Experimentally observed non-monotonous dependence of thin films surface roughness on ion energy is analyzed by kinetic rate equation model. The modeling results show good quantitative agreement with the experiment and give possible physical reasons of behavior of the surface roughness. It is shown that non-monotonous dependence of surface roughness on ion energy is determined by the size of islands and diffusivity of atoms on the surface.
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