Investigation of Dynamic Parameters of Multilayered Microelectromechanical Membranes with Finite Element Modeling
Keywords:
capacitive micromachined ultrasound transducer, finite element modeling, porous silicon.Abstract
Static and dynamic parameters of cMUT cells with layered membranes were investigated using finite elements modeling. It was found that introducing porous silicon in the middle layer of the thin films stack, forming the membrane of the cell, creates an opportunity to operate the cell at more favourable energetic conditions: the excitation voltage can be decreased by 30 %, if porous silicon with 0.5 filling factor is introduced in the middle layer of the membrane. Approximately the same or better increase of receiving sensitivity was also found. Harmonic analysis showed an increase of the electric impedance of the cell with layered membranes at the resonance frequency up to the factor of 2 with simultaneous decrease of the resonance frequency by approximately 0.6 MHz.
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