Formation of Gadolinium Doped Ceria Oxide Thin Films by Electron Beam Deposition
Keywords:electron beam deposition, GDC (gadolinium doped ceria oxide) thin films, microstructure, solid-oxide fuel cells (SOFC).
Gadolinium doped ceria oxide (GDC) thin films were grown evaporating (Ce0.9Gd0.1)O1.95 ceramic powder by using
e-beam deposition technique. Operating technical parameters that influence thin film properties were studied. The GDC
thin films (2 μm – 3 μm of thickness) were deposited on two different types of substrates: porous NiO-YSZ (nickel
oxide – yttrium stabilized zirconium) and Alloy 600 (Fe-Ni-Cr). The influence of electron gun power on thin film
structure and surface morphology were investigated by X-ray diffraction and scanning electron microscopy. It was found
that electron gun power (changed in the range of 0.66 kW – 1.05 kW) has the influence on the crystallite size (it varied
between 7.6 nm – 14.3 nm) of GDC thin films and decreased linearly increasing e-beam gun power
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