Imprint Lithography for Large Scale Angular Encoders
Keywords:nanoimprint lithography, DLC films, glass scales and discs.
This work presents experimental results of research directed toward production of large scale angular encoders using
imprint lithography instead of conventional ultraviolet lithography. Testing of the different mould materials and ion
beam deposited from hexamethyldisiloxane vapour and hydrogen gas mixture film like antisticking coating shows the
best action of the SiOx doped diamond like carbon film coated mould to transfer features of the encoder. It was revealed,
that linear dimensions of elements of the fabricated angular encoders differ from the master and it was shown that
producing of large scale devices requires estimation of thermal behaviour of the used materials
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