Deposition of Amorphous Fe-Zr Alloys by Magnetron Co-sputtering

Authors

  • Aleksandras ILJINAS∗, Sigitas JONELIŪNAS, Darius MILČIUS, Julius DUDONIS Kaunas University of Technology

Keywords:

amorphous metals alloys, Fe-Zr alloys, FTS sputtering, magnetron co-sputering.

Abstract

The formation of amorphous structure of Fe thin films by magnetron co-sputtering deposition dependence on Zr
impurity at room temperature was explored. X-ray diffraction methods were applied for studying a amorphous phase
forming range vs composition of elements. Electrical properties were evaluated by four-probe and van der Pauw
methods. The surface morphology was investigated by SEM. It was found that amorphous structure of Fe-Zr metals
alloy forms when Zr concentration is 9 at.%. The resistivity of amorphous and nanocrystalline Fe1-xZrx thin films is 2 – 3
times bigger than polycrystalline and slightly depends on composition.

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Published

2007-06-11

Issue

Vol. 13 No. 2 (2007)

Section

METALS, ALLOYS, COATINGS

License

 

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