Optical Transmittance Method for In-situ Analysis of Adsorption Phenomena from Residual Gases

Abstract

optical technique as well as experimental results are discussed. The kinetics of the optical absorbance of the growing
film was registered in-situ measuring optical transmission of the film-substrate structure. These measurements were
done in parallel to the ex-situ absorption (UV-VIS) and reflection spectra analysis. The main results were compared with
the optical constants defined by the in-situ technique. Two different groups of samples that were prepared by thermal
evaporation method on glass substrates were investigated. The first group included silver films (as a model material) and
the second one – barium getter films. Such complex measurements enabled to follow adsorption process from the
residual gases during the thermal evaporation as well to control adsorption process after the evaporation. It was shown
that the presented method is very sensitive in small thickness region of deposited films (5 nm – 50 nm) and can be
employed for evaluation of Ba getter efficiency.