Development of SOFC Thin Film Electrolyte Using Electron Beam Evaporation Technique from the Cubic Phase YSZ Powder

Abstract

Formation of YSZ (yttrium stabilized zirconium oxide) thin films using electron beam (e-beam) physical vapor deposition technique was studied. The influence of substrate crystalline structure on growth of deposited YSZ thin film was analyzed. The YSZ thin films (1.5 – 2 μm thicknesses) were deposited on three different types of substrates: Al2O3, optical quartz (SiO2), and Alloy 600 (Fe-Ni-Cr). Cubic phase ZrO2 stabilized by 8 % of Y2O3 (8 % of YSZ) ceramic powder was used as evaporation material. The substrate temperature was changed in the range of 20 °C – 600 °C and its influence on the crystallinity of deposited YSZ thin films was analyzed. It was found that the substrate has no influence on the crystal orientation of the formed YSZ thin films. The dominant orientation of texture of YSZ thin films is cubic (111) and keeping the same with different types of substrate. The crystallite size varied between 20 – 40 nm and increased linearly with substrate temperature.