Micrometer and Sub Micrometer-Size Structures Fabricated by Direct Writing Using Femtosecond Light Pulses
Keywords:
femtosecond fabrication, photomodification, nanostructuring, nanotechnology, waveguide, confocal, optical breakdown.Abstract
In this report we present the results of the sub micrometer-size hillocks and bits recording on the surface and in the volume of dielectric materials using a direct femtosecond laser writing (DFLW) method. Lateral and axial dimensions of fabricated defects were measured (170 ±50) and (440 ±100) nm, respectively. 2D and 3D matrixes with the corresponding densities of 1 Gbit/cm2 and 6 Tbit/cm3 as well as waveguides were recorded using DFLW method.
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