Current Transport Mechanisms and Electrophysical Characteristics of the 4H-SiC p-n Junctions Formed by Aluminum Diffusion
DOI:
https://doi.org/10.5755/j02.ms.36681Keywords:
4H-SiC, aluminum diffusion, p-n junction, I-V characteristic, C-V characteristicAbstract
In this paper, the electrophysical characteristics of the 4H-SiC p-n junction created by low-temperature diffusion of aluminum were studied. Current-voltage (I-V) characteristics are analysed, and the current transport mechanisms in 4H-SiC p-n junctions are discussed. It is shown that at low forward bias voltages, the generation–recombination mechanism dominates, and the I-V characteristics at voltages U > 3.0 V obey the linear law. At reverse biases, the dominant mechanism of current transfer is limited by the space charge.
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