Multicomponent Thin Films Deposited by PVD ARC and LARC Technology

Abstract

The paper is focused on a comparison of advanced layers deposited by two coating technologies – cathodic arc deposition (ARC) and lateral rotating cathodes (LARC). For characterization standard analyses were selected: the determination of the layer wear resistance by Calotest method, specification of the depth concentration profiles of constituting elements from the coating surface down to the substrate, and measurement of the nanohardness at dynamic loading. The thickness of the CrTiN layer reached 1380 nm – 1740 nm and that of the multi/nanolayers AlXN3 was 2630 nm – 3160 nm. The coating nanohardness on the surface attained 39 GPa for AlXN3 (X = Cr), 33 GPa for CrTiN and 12.5 GPa for the substrate. Only at coating prepared by LARC-Technology it is possible to create the multilayers of nanometric dimensions. AlXN3 coating was formed by 48 layers with dimensions of 58 nm – 70 nm. These nanolayers lead to the increase of system toughness as they prevent the crack propagation. Their application on the tools and components promises to increase their durability under service conditions.

DOI: http://dx.doi.org/10.5755/j01.ms.20.1.3716