Kinetics of Ni:C Thin Film Composition Formation at Different Temperatures and Fluxes

Abstract

In this work analysis considering Ni:C thin films growth on thermaly oxidized Si substrate by proposed kinetic model is presented. Model is built considering experimental results where microstructure evolution as a function of the substrate temperature and metal content of Ni:C nanocomposite films grown by hyperthermal ion deposition is investigated. The proposed kinetic model is based on the rate equations and includes processes of adsorption, surface segregation, diffusion, chemical reactions of constituents. The experimental depth profile curves were fitted by using proposed model. The obtained results show a good agreement with experiment taking into account concentration dependent diffusion. It is shown by modeling that with the increase of substrate temperature the process of nickel surface segregation becomes most important.

DOI: http://dx.doi.org/10.5755/j01.ms.19.3.5234