Fabrication of Periodic Micro-Structures by Multi-Photon Polymerization Using the Femtosecond Laser and Four-Beam Interference
Keywords:Multi-photon polymerization, periodic micro-structures, interference, SZ2080, ORMOSIL, femtosecond laser
AbstractMulti-photon polymerization by interference is a promising technique for mass fabrication of 3D periodic micro-structures over large areas, which can be used in various fields such as biomedicine (cell growing), photonics (photonics crystals), etc. As direct laser writing approach is a relatively slow process, fabrication of periodic structures by interference field of a few laser beams can be a significantly faster alternative route of parallel processing. The periodic structures are produced by the single laser exposure over the whole irradiated area. In this paper we present examples how periodic micro-structures can be fabricated over a large area by multi-photon polymerization in a negative photopolymer SZ2080 (ORMOSIL) using four-beam interference of a femtosecond laser.
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