Hydrophobic Diamond Like Carbon Film for Surface Micromachining
Keywords:diamond like carbon (DLC), surface micromachining, microelectromechanical (MEMS) switch, stiction
stiction during fabrication of surface micromachined electrostatically actuated microelectromechanical switch. Hydrophobic properties of the SiOx doped DLC film were determined using Zisman method (average critical surface tension 42.0 mN/m) and the average surface roughness was determined by atomic force microscope (Ra = 2.1 nm). The SiOx doped DLC film surface properties were compared with actual Si <100> and Au film surface properties under the same investigation procedures. The X-ray photoelectron spectroscopy (XPS) showed typical chemical structure of SiOx doped DLC film. High resolution scanning electron microscopy showed that microelectromechanical switch was successfully fabricated using SiOx doped DLC film, the defects caused by stiction phenomenon were not observed.
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