Design and Fabrication of a Microelectromechanical Switch
Keywords:surface micromachining technique, microelectromechanical (MEMS) switch.
Surface micromachining technique was applied to produce electrostatically actuated microelectromechanical (MEMS) switch. Vibrating cantilever beam of varying length was fabricated using a copper sacrificial layer and nickel electroplating technique. The length and thickness of a cantilever beam as well as a gap space determines actuation voltage and should be optimized to ensure the best performance of a switch. The fabricated microelectromechanical switch can be used as autonomous electrostatically driven microrelay or can be integrated for use in semiconductor chips or hybrid devices.
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